«Nanotechnologies in Electronics» Shared Use Center Laboratory of Nanomaterials Technology Laboratory of Solid-state Nano-level Modification Laboratory of Nanoelectronic Elements Laboratory of Micro- and Nanosystem Technology «Prospective Technologies for Opto- and Nanoelectronics» Research and Education Center Laboratory of Radiation Methods, Technologies, Analysis and Capillary X-Ray Optics Laboratory of Superconductive Electronics Laboratory of Electron Microscopy Laboratory of Atomic Modification and Analysis of Semiconductor Surface Laboratory of Biomedical Nanotechnology